WebCPC CPC COOPERATIVE PATENT CLASSIFICATION

G01Q　SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]

G01Q 10/00 Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe

G01Q 10/02 ・Coarse scanning or positioning

G01Q 10/04 ・Fine scanning or positioning

G01Q 10/045 ・・{Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe}

G01Q 10/06 ・・Circuits or algorithms therefor

G01Q 10/065 ・・・{Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself}

G01Q 20/00 Monitoring the movement or position of the probe

G01Q 20/02 ・by optical means

G01Q 20/04 ・Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezo-electric gauge

G01Q 30/00 Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices

G01Q 30/02 ・Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope

G01Q 30/025 ・・{Optical microscopes coupled with SPM}

G01Q 30/04 ・Display or data processing devices

G01Q 30/06 ・・for error compensation

G01Q 30/08 ・Means for establishing or regulating a desired environmental condition within a sample chamber

G01Q 30/10 ・・Thermal environment

G01Q 30/12 ・・Fluid environment

G01Q 30/14 ・・・Liquid environment

G01Q 30/16 ・・Vacuum environment

G01Q 30/18 ・Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g. vibrations or electromagnetic fields

G01Q 30/20 ・Sample handling device or method

G01Q 40/00 Calibration, e.g. of probes

G01Q 40/02 ・Calibration standards and methods of fabrication thereof

G01Q 60/00 Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof

G01Q 60/02 ・Multiple-type SPM, i.e. involving more than one SPM technique

G01Q 60/04 ・・STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]

G01Q 60/06 ・・SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]

G01Q 60/08 ・・MFM [Magnetic Force Microscopy] combined with AFM [Atomic Force Microscopy

G01Q 60/10 ・STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes

G01Q 60/12 ・・STS [Scanning Tunnelling Spectroscopy]

G01Q 60/14 ・・STP [Scanning Tunnelling Potentiometry]

G01Q 60/16 ・・Probes, their manufacture, or their related instrumentation, e.g. holders

G01Q 60/18 ・SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes

G01Q 60/20 ・・Fluorescence

G01Q 60/22 ・・Probes, their manufacture, or their related instrumentation, e.g. holders

G01Q 60/24 ・AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes

G01Q 60/26 ・・Friction force microscopy

G01Q 60/28 ・・Adhesion force microscopy

G01Q 60/30 ・・Scanning potential microscopy

G01Q 60/32 ・・AC mode

G01Q 60/34 ・・・Tapping mode

G01Q 60/36 ・・DC mode

G01Q 60/363 ・・・{Contact-mode AFM}

G01Q 60/366 ・・・{Nanoindenters, i.e. wherein the indenting force is measured}

G01Q 60/38 ・・Probes, their manufacture, or their related instrumentation, e.g. holders

G01Q 60/40 ・・・Conductive probes

G01Q 60/42 ・・・Functionalization

G01Q 60/44 ・SICM [Scanning Ion-Conductance Microscopy] or apparatus therefor, e.g. SICM probes

G01Q 60/46 ・SCM [Scanning Capacitance Microscopy] or apparatus therefor, e.g. SCM probes

G01Q 60/48 ・・Probes, their manufacture, or their related instrumentation, e.g. holders

G01Q 60/50 ・MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes

G01Q 60/52 ・・Resonance

G01Q 60/54 ・・Probes, their manufacture, or their related instrumentation, e.g. holders

G01Q 60/56 ・・・Probes with magnetic coating

G01Q 60/58 ・SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes

G01Q 60/60 ・SECM [Scanning Electro-Chemical Microscopy] or apparatus therefor, e.g. SECM probes

G01Q 70/00 General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q 60/00

G01Q 70/02 ・Probe holders

G01Q 70/04 ・・with compensation for temperature or vibration induced errors

G01Q 70/06 ・Probe tip arrays

G01Q 70/08 ・Probe characteristics

G01Q 70/10 ・・Shape or taper

G01Q 70/12 ・・・Nano-tube tips

G01Q 70/14 ・・Particular materials

G01Q 70/16 ・Probe manufacture

G01Q 70/18 ・・Functionalization

G01Q 80/00 Applications, other than SPM, of scanning-probe techniques (manufacture or treatment of nano-structures B82B 3/00; recording or reproducing information using near-field interaction G11B 9/12, G11B 11/24, G11B 13/08)

G01Q 90/00 Scanning-probe techniques or apparatus not otherwise provided for